Orthogonality correction of planar sample scanner for atomic force microscope

Abstract

A planar scanner of an atomic force microscope (AFM) can move samples to within a few nm of resolution. Tube piezoelectric actuators have coupling errors, that can be eliminated by software correction; however, residual errors can deteriorate the actual information in a small-feature sample. To obtain stable AFM images of small-feature samples, a closed-loop. control cannot be used due to the large random errors of the sensor. The orthogonality of a new sample scanner having a motion guide is measured and corrected using a simple electronic circuit in open-loop scanning to reduce the scanner artifact.