DC Field | Value | Language |
---|---|---|
dc.contributor.author | KONG, IB | ko |
dc.contributor.author | Kim, Seung-Woo | ko |
dc.date.accessioned | 2007-10-05T06:07:21Z | - |
dc.date.available | 2007-10-05T06:07:21Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 1995-05 | - |
dc.identifier.citation | OPTICAL ENGINEERING, v.34, no.5, pp.1400 - 1404 | - |
dc.identifier.issn | 0091-3286 | - |
dc.identifier.uri | http://hdl.handle.net/10203/1656 | - |
dc.description | Copyright 1995 Society of Photo-Optical Instrumentation Engineers. | en |
dc.description.abstract | One important issue in phase-shifting interferometry is to eliminate phase-shift errors so as to enhance achievable measurement accuracy. We propose a new phase-measuring algorithm that can identify the actual amounts of phase shifts directly from interferograms without prior calibration, This is named the A-bucket algorithm and has the advantage of being inherently free from any phase-shift error that is constant across an interferogram. The main emphasis of this paper is given to a practicable application of the A-bucket algorithm to prove that accurate measurement is allowed in portable mode even in the presence of vibration. | - |
dc.language | English | - |
dc.language.iso | en_US | en |
dc.publisher | SOC PHOTO-OPT INSTRUM ENG | - |
dc.subject | HETERODYNE | - |
dc.title | PORTABLE INSPECTION OF PRECISION SURFACES BY PHASE-SHIFTING INTERFEROMETRY WITH AUTOMATIC SUPPRESSION OF PHASE-SHIFT ERRORS | - |
dc.type | Article | - |
dc.identifier.wosid | A1995QX17900020 | - |
dc.identifier.scopusid | 2-s2.0-0029297135 | - |
dc.type.rims | ART | - |
dc.citation.volume | 34 | - |
dc.citation.issue | 5 | - |
dc.citation.beginningpage | 1400 | - |
dc.citation.endingpage | 1404 | - |
dc.citation.publicationname | OPTICAL ENGINEERING | - |
dc.embargo.liftdate | 9999-12-31 | - |
dc.embargo.terms | 9999-12-31 | - |
dc.contributor.localauthor | Kim, Seung-Woo | - |
dc.contributor.nonIdAuthor | KONG, IB | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordAuthor | SURFACE METROLOGY | - |
dc.subject.keywordAuthor | PHASE-SHIFTING INTERFEROMETRY | - |
dc.subject.keywordAuthor | PHASE-MEASURING ALGORITHM | - |
dc.subject.keywordAuthor | A-BUCKET ALGORITHM | - |
dc.subject.keywordAuthor | IN SITU INSPECTION | - |
dc.subject.keywordAuthor | PORTABLE MEASUREMENT | - |
dc.subject.keywordPlus | HETERODYNE | - |
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