Performance evaluation of deterministic flow lines: Redundant modules and application to semiconductor manufacturing equipment
- Publisher
- IEEE
- Issue Date
- 2010-08-21
- Language
- ENG
- Citation
2010 IEEE International Conference on Automation Science and Engineering, CASE 2010, pp.45 - 50
- Appears in Collection
- EE-Conference Papers(학술회의논문)
- Files in This Item
- There are no files associated with this item.
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