Control of wafer release in multi cluster tools
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Park, Kyung Soo | - |
| dc.contributor.author | Morrison J.R. | - |
| dc.date.accessioned | 2013-03-28T09:28:53Z | - |
| dc.date.available | 2013-03-28T09:28:53Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2010-06-09 | - |
| dc.identifier.citation | 2010 8th IEEE International Conference on Control and Automation, ICCA 2010, v., no., pp.1481 - 1487 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/164526 | - |
| dc.language | ENG | - |
| dc.title | Control of wafer release in multi cluster tools | - |
| dc.type | Conference | - |
| dc.identifier.scopusid | 2-s2.0-77957862979 | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 1481 | - |
| dc.citation.endingpage | 1487 | - |
| dc.citation.publicationname | 2010 8th IEEE International Conference on Control and Automation, ICCA 2010 | - |
| dc.identifier.conferencecountry | China | - |
| dc.identifier.conferencecountry | China | - |
| dc.contributor.localauthor | Park, Kyung Soo | - |
| dc.contributor.nonIdAuthor | Morrison J.R. | - |
- Appears in Collection
- IE-Conference Papers(학술회의논문)
- Files in This Item
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.