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College of Engineering(공과대학)School of Electrical Engineering(전기및전자공학부)EE-Conference Papers(학술회의논문)

MEMS variable capacitor with superior linearity and large tuning ratio by moving the plate to the increasing-gap direction

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dc.contributor.authorHan, C.-H.ko
dc.contributor.authorChoi, D.-H.ko
dc.contributor.authorChoi, S.-J.ko
dc.contributor.authorYoon, Jun-Boko
dc.date.accessioned2013-03-28T08:45:30Z-
dc.date.available2013-03-28T08:45:30Z-
dc.date.created2012-02-06-
dc.date.created2012-02-06-
dc.date.issued2011-01-23-
dc.identifier.citation24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011, pp.772 - 775-
dc.identifier.issn1084-6999-
dc.identifier.urihttp://hdl.handle.net/10203/164246-
dc.languageEnglish-
dc.publisherIEEE-
dc.titleMEMS variable capacitor with superior linearity and large tuning ratio by moving the plate to the increasing-gap direction-
dc.typeConference-
dc.identifier.wosid000295841200192-
dc.identifier.scopusid2-s2.0-79953771758-
dc.type.rimsCONF-
dc.citation.beginningpage772-
dc.citation.endingpage775-
dc.citation.publicationname24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011-
dc.identifier.conferencecountryMX-
dc.identifier.conferencelocationCancun-
dc.contributor.localauthorYoon, Jun-Bo-
dc.contributor.nonIdAuthorHan, C.-H.-
dc.contributor.nonIdAuthorChoi, D.-H.-
dc.contributor.nonIdAuthorChoi, S.-J.-
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EE-Conference Papers(학술회의논문)
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