Annealing effect on contact characteristics in TiN based 3-terminal NEM relays
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Lee, J.-O. | - |
| dc.contributor.author | Kim, M.-W. | - |
| dc.contributor.author | Ko, S.-D. | - |
| dc.contributor.author | Yoon, Jun-Bo | - |
| dc.date.accessioned | 2013-03-28T07:41:13Z | - |
| dc.date.available | 2013-03-28T07:41:13Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2010-08-17 | - |
| dc.identifier.citation | 2010 10th IEEE Conference on Nanotechnology, NANO 2010, v., no., pp.258 - 261 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/163895 | - |
| dc.language | ENG | - |
| dc.publisher | IEEE | - |
| dc.title | Annealing effect on contact characteristics in TiN based 3-terminal NEM relays | - |
| dc.type | Conference | - |
| dc.identifier.scopusid | 2-s2.0-79951833474 | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 258 | - |
| dc.citation.endingpage | 261 | - |
| dc.citation.publicationname | 2010 10th IEEE Conference on Nanotechnology, NANO 2010 | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.contributor.localauthor | Yoon, Jun-Bo | - |
| dc.contributor.nonIdAuthor | Lee, J.-O. | - |
| dc.contributor.nonIdAuthor | Kim, M.-W. | - |
| dc.contributor.nonIdAuthor | Ko, S.-D. | - |
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