High-accuracy digital-to-analog actuators using parallel spring array
- Issue Date
- 2007-08-12
- Language
- ENG
- Citation
2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS, pp.53 - 54
- Appears in Collection
- BiS-Conference Papers(학술회의논문)
- Files in This Item
- There are no files associated with this item.
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