Characterizatoin of nano-grained ZnO piezoelectric thin films deposited under various sputtering conditions
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Zhang, Ruirui | - |
| dc.contributor.author | 이은주 | - |
| dc.contributor.author | 윤기완 | - |
| dc.date.accessioned | 2013-03-27T08:59:51Z | - |
| dc.date.available | 2013-03-27T08:59:51Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2009-05 | - |
| dc.identifier.citation | 한국해양정보통신학회 추계종합학술대회, v., no., pp.428 - 430 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/161063 | - |
| dc.language | KOR | - |
| dc.publisher | 한국해양정보통신학회 | - |
| dc.title | Characterizatoin of nano-grained ZnO piezoelectric thin films deposited under various sputtering conditions | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 428 | - |
| dc.citation.endingpage | 430 | - |
| dc.citation.publicationname | 한국해양정보통신학회 추계종합학술대회 | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.contributor.localauthor | 이은주 | - |
| dc.contributor.localauthor | 윤기완 | - |
| dc.contributor.nonIdAuthor | Zhang, Ruirui | - |
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