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College of Engineering(공과대학)Dept. of Nuclear and Quantum Engineering(원자력및양자공학과)NE-Conference Papers(학술회의논문)

Plasma parameter dependence of critical particle size at the moment of void formation in RF silane plasmas

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dc.contributor.authorSeon, CR-
dc.contributor.authorChai, KB-
dc.contributor.authorChoe, Wonho-
dc.contributor.authorPark, S-
dc.contributor.authorChung, CW-
dc.date.accessioned2013-03-27T03:58:35Z-
dc.date.available2013-03-27T03:58:35Z-
dc.date.created2012-02-06-
dc.date.issued2008-05-18-
dc.identifier.citation5th International Conference on the Physics of Dusty Plasmas, v., no., pp.177 - 178-
dc.identifier.urihttp://hdl.handle.net/10203/158869-
dc.languageENG-
dc.titlePlasma parameter dependence of critical particle size at the moment of void formation in RF silane plasmas-
dc.typeConference-
dc.identifier.scopusid2-s2.0-54049129688-
dc.type.rimsCONF-
dc.citation.beginningpage177-
dc.citation.endingpage178-
dc.citation.publicationname5th International Conference on the Physics of Dusty Plasmas-
dc.identifier.conferencecountryPortugal-
dc.identifier.conferencecountryPortugal-
dc.contributor.localauthorChoe, Wonho-
dc.contributor.nonIdAuthorSeon, CR-
dc.contributor.nonIdAuthorChai, KB-
dc.contributor.nonIdAuthorPark, S-
dc.contributor.nonIdAuthorChung, CW-
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NE-Conference Papers(학술회의논문)
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