Regular flow line models for semiconductor cluster tools: A case of lot dependent process times
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Morrison, James R | ko |
| dc.date.accessioned | 2013-03-27T03:40:34Z | - |
| dc.date.available | 2013-03-27T03:40:34Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2009-08-22 | - |
| dc.identifier.citation | 2009 IEEE International Conference on Automation Science and Engineering, CASE 2009, pp.561 - 566 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/158728 | - |
| dc.language | English | - |
| dc.publisher | 123 | - |
| dc.title | Regular flow line models for semiconductor cluster tools: A case of lot dependent process times | - |
| dc.type | Conference | - |
| dc.identifier.wosid | 000276311700097 | - |
| dc.identifier.scopusid | 2-s2.0-70449122721 | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 561 | - |
| dc.citation.endingpage | 566 | - |
| dc.citation.publicationname | 2009 IEEE International Conference on Automation Science and Engineering, CASE 2009 | - |
| dc.identifier.conferencecountry | II | - |
| dc.identifier.conferencelocation | Bangalore | - |
| dc.contributor.localauthor | Morrison, James R | - |
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