Hot-Wire CVD방법을 이용한 저온 에피택셜 실리콘 박막의 표면 텍스처 형성
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Ahn, Byung Tae | - |
| dc.date.accessioned | 2013-03-27T00:45:07Z | - |
| dc.date.available | 2013-03-27T00:45:07Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2007-11-02 | - |
| dc.identifier.citation | 한국재료학회 추계학술발표대회, v., no., pp. - | - |
| dc.identifier.uri | http://hdl.handle.net/10203/157600 | - |
| dc.language | KOR | - |
| dc.title | Hot-Wire CVD방법을 이용한 저온 에피택셜 실리콘 박막의 표면 텍스처 형성 | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.publicationname | 한국재료학회 추계학술발표대회 | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.contributor.localauthor | Ahn, Byung Tae | - |
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