Atomic layer deposition of copper thin film using Cu II(diketoiminate)2 and H2

Cited 0 time in webofscience Cited 0 time in scopus
  • Hit : 375
  • Download : 0
DC FieldValueLanguage
dc.contributor.authorHan B.-
dc.contributor.authorParka K.-M.-
dc.contributor.authorPark K.-
dc.contributor.authorPark J.-W.-
dc.contributor.authorLee W.-J.-
dc.date.accessioned2013-03-27T00:27:50Z-
dc.date.available2013-03-27T00:27:50Z-
dc.date.created2012-02-06-
dc.date.issued2009-06-01-
dc.identifier.citation2009 IEEE International Interconnect Technology Conference, IITC 2009, v., no., pp.173 - 174-
dc.identifier.urihttp://hdl.handle.net/10203/157504-
dc.languageENG-
dc.titleAtomic layer deposition of copper thin film using Cu II(diketoiminate)2 and H2-
dc.typeConference-
dc.identifier.scopusid2-s2.0-70349446742-
dc.type.rimsCONF-
dc.citation.beginningpage173-
dc.citation.endingpage174-
dc.citation.publicationname2009 IEEE International Interconnect Technology Conference, IITC 2009-
dc.identifier.conferencecountryJapan-
dc.identifier.conferencecountryJapan-
dc.contributor.localauthorPark K.-
dc.contributor.nonIdAuthorHan B.-
dc.contributor.nonIdAuthorParka K.-M.-
dc.contributor.nonIdAuthorPark J.-W.-
dc.contributor.nonIdAuthorLee W.-J.-
Appears in Collection
RIMS Conference Papers
Files in This Item
There are no files associated with this item.

qr_code

  • mendeley

    citeulike


rss_1.0 rss_2.0 atom_1.0