High-Q, tunable-gap MEMS variable capacitor actuated with an electrically floating plate
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Hyung, S.L. | ko |
| dc.contributor.author | Young, J.Y. | ko |
| dc.contributor.author | Choi, D.-H. | ko |
| dc.contributor.author | Yoon, Jun-Bo | ko |
| dc.date.accessioned | 2013-03-26T01:10:43Z | - |
| dc.date.available | 2013-03-26T01:10:43Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2008-01-13 | - |
| dc.identifier.citation | 21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson, pp.180 - 183 | - |
| dc.identifier.issn | 1084-6999 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/156654 | - |
| dc.language | English | - |
| dc.publisher | 123 | - |
| dc.title | High-Q, tunable-gap MEMS variable capacitor actuated with an electrically floating plate | - |
| dc.type | Conference | - |
| dc.identifier.wosid | 000253356900045 | - |
| dc.identifier.scopusid | 2-s2.0-50149089419 | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 180 | - |
| dc.citation.endingpage | 183 | - |
| dc.citation.publicationname | 21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson | - |
| dc.identifier.conferencecountry | US | - |
| dc.identifier.conferencelocation | Tucson, AZ | - |
| dc.contributor.localauthor | Yoon, Jun-Bo | - |
| dc.contributor.nonIdAuthor | Hyung, S.L. | - |
| dc.contributor.nonIdAuthor | Young, J.Y. | - |
| dc.contributor.nonIdAuthor | Choi, D.-H. | - |
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