DSpace at KOASAS: High-precision micromechanical tunable capacitors using parallel-interconnected digital actuators

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College of Engineering(공과대학)Dept. of Bio and Brain Engineering(바이오및뇌공학과)BiS-Conference Papers(학술회의논문)

High-precision micromechanical tunable capacitors using parallel-interconnected digital actuators

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Han, W / Cho, Young-Ho researcher

Publisher: 123

Issue Date: 2007-01-21

Language: English

Citation: 20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007, pp.815 - 818

ISSN: 1084-6999

URI: http://hdl.handle.net/10203/156653

Appears in Collection: BiS-Conference Papers(학술회의논문)

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