DC Field | Value | Language |
---|---|---|
dc.contributor.author | 조병진 | - |
dc.contributor.author | He, W | - |
dc.date.accessioned | 2013-03-26T00:44:21Z | - |
dc.date.available | 2013-03-26T00:44:21Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2008-05-30 | - |
dc.identifier.citation | The 4th Korean ALD Workshop, v., no., pp.99 - 115 | - |
dc.identifier.uri | http://hdl.handle.net/10203/156484 | - |
dc.language | KOR | - |
dc.title | ALD of HfLaO and AlLaO for Flash Memory Device Application | - |
dc.type | Conference | - |
dc.type.rims | CONF | - |
dc.citation.beginningpage | 99 | - |
dc.citation.endingpage | 115 | - |
dc.citation.publicationname | The 4th Korean ALD Workshop | - |
dc.identifier.conferencecountry | South Korea | - |
dc.identifier.conferencecountry | South Korea | - |
dc.contributor.localauthor | 조병진 | - |
dc.contributor.nonIdAuthor | He, W | - |
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