Thermal Annealing 효과에 의한 다층박막 FBAR 소자의 공진특성개선

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Publisher
한국해양정보통신학회
Issue Date
2003-10
Language
KOR
Citation

한국해양정보통신학회추계학술대회, pp.633 - 636

URI
http://hdl.handle.net/10203/153464
Appears in Collection
EE-Conference Papers(학술회의논문)
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