Voltage and temperature dependence of capacitance of high-K hfO2 MIM capacitors: A unified understanding and prediction
- Publisher
- IEEE International Electron Devices
- Issue Date
- 2003-12-08
- Language
- English
- Citation
International Electron Device Meeting (IEDM), pp.0 - 0
- Appears in Collection
- EE-Conference Papers(학술회의논문)
- Files in This Item
- There are no files associated with this item.
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