DSpace at KOASAS: Scheduling wafer lots on diffusion machines in a semiconductor wafer fabrication facility

DSpace at KOASAS

College of Engineering(공과대학)Dept. of Industrial and Systems Engineering(산업및시스템공학과)IE-Conference Papers(학술회의논문)

Scheduling wafer lots on diffusion machines in a semiconductor wafer fabrication facility

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Choi, So-Young / Joo, Byung-Jun / Kim, Yeong-Dae researcher

Issue Date: 2005

Language: ENG

Citation: International Conference on Modeling and Analysis of Semiconductor Manufacturing, pp.28 - 33

URI: http://hdl.handle.net/10203/151211

Appears in Collection: IE-Conference Papers(학술회의논문)

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