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College of Engineering(공과대학)Dept. of Materials Science and Engineering(신소재공학과)MS-Conference Papers(학술회의논문)

Effects of Oxygen on the property of metallic Ru thin films deposited using Ru(C6H6)(C6H8) precursor

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dc.contributor.authorNo, Kwangsoo-
dc.contributor.authorChoi, Jong Wan-
dc.contributor.authorHong, Jong In-
dc.contributor.authorKim, Sung Kwan-
dc.contributor.authorKim, Yun Seok-
dc.contributor.authorKim, Yun Soo-
dc.contributor.authorChung, Taek-Mo-
dc.contributor.authorOh, Young Woo-
dc.date.accessioned2013-03-18T18:00:10Z-
dc.date.available2013-03-18T18:00:10Z-
dc.date.created2012-02-06-
dc.date.issued2003-12-13-
dc.identifier.citation4th Asian Meeting on Ferroelectrics, v.0, no.0, pp.0 - 0-
dc.identifier.urihttp://hdl.handle.net/10203/150980-
dc.languageENG-
dc.titleEffects of Oxygen on the property of metallic Ru thin films deposited using Ru(C6H6)(C6H8) precursor-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.volume0-
dc.citation.issue0-
dc.citation.beginningpage0-
dc.citation.endingpage0-
dc.citation.publicationname4th Asian Meeting on Ferroelectrics-
dc.identifier.conferencecountryIndia-
dc.identifier.conferencecountryIndia-
dc.contributor.localauthorNo, Kwangsoo-
dc.contributor.nonIdAuthorChoi, Jong Wan-
dc.contributor.nonIdAuthorHong, Jong In-
dc.contributor.nonIdAuthorKim, Sung Kwan-
dc.contributor.nonIdAuthorKim, Yun Seok-
dc.contributor.nonIdAuthorKim, Yun Soo-
dc.contributor.nonIdAuthorChung, Taek-Mo-
dc.contributor.nonIdAuthorOh, Young Woo-
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MS-Conference Papers(학술회의논문)
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