Synthesis of Methacrylate-based Polymers with Ethyl-4-Methyl-2-Diazo-3-Oxo-Pentenoate and their Application as DUV Resists
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Kim, Kyung Sun | - |
| dc.contributor.author | Kim, Jin-Baek | - |
| dc.date.accessioned | 2013-03-18T17:59:46Z | - |
| dc.date.available | 2013-03-18T17:59:46Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2004-04 | - |
| dc.identifier.citation | 한국고분자학회 2004년 춘계학술대회, v.29, no.1, pp.208 - | - |
| dc.identifier.uri | http://hdl.handle.net/10203/150977 | - |
| dc.language | ENG | - |
| dc.publisher | 한국고분자학회 | - |
| dc.title | Synthesis of Methacrylate-based Polymers with Ethyl-4-Methyl-2-Diazo-3-Oxo-Pentenoate and their Application as DUV Resists | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.volume | 29 | - |
| dc.citation.issue | 1 | - |
| dc.citation.beginningpage | 208 | - |
| dc.citation.publicationname | 한국고분자학회 2004년 춘계학술대회 | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.contributor.localauthor | Kim, Jin-Baek | - |
| dc.contributor.nonIdAuthor | Kim, Kyung Sun | - |
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