DSpace at KOASAS: Electronic state and O K-edge of Zr oxide and Hf oxide thin films for phase shift mask

DSpace at KOASAS

College of Engineering(공과대학)Dept. of Materials Science and Engineering(신소재공학과)MS-Conference Papers(학술회의논문)

Electronic state and O K-edge of Zr oxide and Hf oxide thin films for phase shift mask

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No, Kwangsoo researcher / Kim, Sung Kwan / Kim, Yang Soo / Lee, Min Sang / Ko, Hyun Chul

Publisher: The 17th DV-Xα meeting

Issue Date: 2004-08-05

Language: ENG

Citation: The 17th DV-Xα meeting, v.0, no.0, pp.0 - 0

URI: http://hdl.handle.net/10203/150852

Appears in Collection: MS-Conference Papers(학술회의논문)

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