A Frequency-tunable microactuator with a varied comb-width profile
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Lee, KB | - |
| dc.contributor.author | Lin, L | - |
| dc.contributor.author | Cho, Young-Ho | - |
| dc.date.accessioned | 2013-03-18T16:04:36Z | - |
| dc.date.available | 2013-03-18T16:04:36Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2004-01-25 | - |
| dc.identifier.citation | 17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS): Maastricht MEMS 2004 Technical Digest, v., no., pp.257 - 260 | - |
| dc.identifier.issn | 1084-6999 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/150020 | - |
| dc.language | ENG | - |
| dc.title | A Frequency-tunable microactuator with a varied comb-width profile | - |
| dc.type | Conference | - |
| dc.identifier.scopusid | 2-s2.0-3042702901 | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 257 | - |
| dc.citation.endingpage | 260 | - |
| dc.citation.publicationname | 17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS): Maastricht MEMS 2004 Technical Digest | - |
| dc.identifier.conferencecountry | Netherlands | - |
| dc.identifier.conferencecountry | Netherlands | - |
| dc.contributor.localauthor | Cho, Young-Ho | - |
| dc.contributor.nonIdAuthor | Lee, KB | - |
| dc.contributor.nonIdAuthor | Lin, L | - |
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