Showing results 1 to 5 of 5
Analysis and control of worst-case wafer delays in cluster tools with K-cyclic schedules = K-주기 스케줄을 갖는 클러스터 장비의 최악의 경우 웨이퍼 지연 분석 및 제어link Roh, Dong-Hyun; Lee, Tae-Eog; et al, 한국과학기술원, 2019 |
Characterizing the Worst-Case Wafer Delay in a Cluster Tool Operated in a K-Cyclic Schedule Roh, Dong-Hyun; Lee, Tae-Eog, 2018 IEEE 14th International Conference on Automation Science and Engineering (CASE), pp.1562 - 1567, IEEE, 2018-08 |
Characterizing Token Delays of Timed Event Graphs for K-Cyclic Schedules Lee, Tae-Eog; Kim, Hyunjung; Roh, Dong-Hyun; Sreenivas, Ramavarapu S., IEEE TRANSACTIONS ON AUTOMATIC CONTROL, v.62, no.2, pp.961 - 966, 2017-02 |
K-Cyclic Schedules and the Worst-Case Wafer Delay in a Dual-Armed Cluster Tool Roh, Dong-Hyun; Lee, Tae-Gyung; Lee, Tae-Eog, IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.32, no.2, pp.236 - 249, 2019-05 |
The open architecture scheduling system for a single-armed cluster tool with PM cleaning operations Roh, Dong-Hyun; Lee, Tae-Eog, 16th International Conference on Modeling and Applied Simulation, MAS 2017, pp.60 - 67, CAL-TEK S.r.l., 2017-09-18 |
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