Browse "Dept. of Industrial and Systems Engineering(산업및시스템공학과)" by Subject photolithography cluster tools

Showing results 1 to 4 of 4

1
Deterministic Flow Lines With Applications

Morrison, James R, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.7, pp.228 - 239, 2010-04

2
Flow Line Models for hightech manufacturing: theory, application and optimization = 첨단 제조 산업을 위한 Flow Line Models: 이론, 적용과 최적화link

Park, Kyung-Su; 박경수; et al, 한국과학기술원, 2014

3
Multiclass Flow Line Models of Semiconductor Manufacturing Equipment for Fab-Level Simulation

Morrison, James R, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.8, no.1, pp.81 - 94, 2011-01

4
Performance evaluation of photolithography cluster tools

Morrison, James R; Martin, DP, OR SPECTRUM, v.29, no.3, pp.375 - 389, 2007-07

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