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Showing results 1 to 5 of 5

1
Scheduling cluster tools for concurrent processing of multiple wafer types = 복수 웨이퍼 혼류생산을 위한 클러스터 장비 스케줄링link

Lee, Jun-Ho; 이준호; et al, 한국과학기술원, 2013

2
Scheduling Cluster Tools for Concurrent Processing of Two Wafer Types

Lee, Jun-Ho; Kim, Hyunjung; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.11, no.2, pp.525 - 536, 2014-04

3
Scheduling cluster tools for concurrent processing of two wafer types with PM sharing

Lee, Jun-Ho; Kim, Hyunjung; Lee, Tae-Eog, INTERNATIONAL JOURNAL OF PRODUCTION RESEARCH, v.53, no.19, pp.6007 - 6022, 2015-10

4
Scheduling Dual-Armed Cluster Tools for Concurrent Processing of Multiple Wafer Types With Identical Job Flows

Ko, Sung-Gil; Yu, Tae-Sun; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.16, no.3, pp.1058 - 1070, 2019-07

5
Wafer Delay Analysis and Workload Balancing of Parallel Chambers for Dual-Armed Cluster Tools With Multiple Wafer Types

Ko, Sung-Gil; Yu, Tae-Sun; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.18, no.3, pp.1516 - 1526, 2021-07

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