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Browse "Dept. of Industrial and Systems Engineering(산업및시스템공학과)" by Subject Semiconductor manufacturing▼acluster tool▼awafer delay▼achamber cleaning▼aprocess time variation▼aresource interference

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(A) new class of sequences that minimizes work cycle interferences for cluster tools with wafer delay constraints = 웨이퍼 지연제약조건을 고려한 클러스터 장비에서 작업주기 내 간섭을 최소화하는 로봇작업순서link

Lim, Yuchul; Lee, Tae Eog; et al, 한국과학기술원, 2018

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