Browse "Dept. of Industrial and Systems Engineering(산업및시스템공학과)" by Subject Semiconductor manufacturing▼aCluster Tool▼aWafer Delay▼aSteady Schedule▼aRandom Disruptive Event▼aClose-down▼aTransient Period
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| Scheduling transient period of cluster tools to reach a steady schedule = 반도체 제조용 클러스터 장비에서 안정상태 도달을 위한 전이기간 스케줄링link Kim, Woojin; Lee, Tae-Eog; et al, 한국과학기술원, 2018 |
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