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Browse "Dept. of Industrial and Systems Engineering(산업및시스템공학과)" by Subject Semiconductor▼aCritical Dimension▼aRegression▼aVariational Auto-Encoder▼aGaussian Process▼aHierarchical Model

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변분 오토인코더와 가우시안 프로세스의 계층적 모델을 활용한 반도체 글라스의 임계 치수의 예측 = Prediction about critical dimension of semiconductor glass using a hierarchical model of variational auto-encoder and gaussian processlink

유현웅; 문일철; et al, 한국과학기술원, 2021

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