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Control charts for random and fixed components of variation in the case of fixed wafer locations and measurement positions Kim, KS; Yum, Bong-Jin, IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.12, no.2, pp.214 - 228, 1999-05 |
Control charts for random and fixed components of variation in the case of split-unit structure of data = 데이터의 분할구조하에서 변량적 변동과 고정적 변동 성분에 대한 관리도의 개발link Kim, Kil-Soo; 김길수; et al, 한국과학기술원, 1999 |
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