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Closed-Form Expressions on Lot Completion Time for Dual-Armed Cluster Tools With Parallel Processing Modules Kim, Hyunjung; Lee, Jun-Ho, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.16, no.2, pp.898 - 907, 2019-04 |
Exit Recursion Models of Clustered Photolithography Tools for Fab Level Simulation Park, Jung Yeon; Park, Kyungsu; Morrison, James R., IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.30, no.1, pp.39 - 51, 2017-02 |
Heuristics for selecting machines and determining buffer capacities in assembly systems Jeong, KC; Kim, Yeong-Dae, COMPUTERS INDUSTRIAL ENGINEERING, v.38, no.3, pp.341 - 360, 2000-10 |
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