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Non-Cyclic Scheduling of a Wet Station Kim, Hyunjung; Lee, Jun-Ho; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.11, no.4, pp.1262 - 1274, 2014-10 |
Simplification methods for accelerating simulation-based real-time scheduling in a semiconductor wafer fabrication facility Kim, Yeong-Dae; Shim, SO; Choi, B; Hwang, Hark, IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.16, pp.290 - 298, 2003-05 |
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