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Multiclass Flow Line Models of Semiconductor Manufacturing Equipment for Fab-Level Simulation Morrison, James R, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.8, no.1, pp.81 - 94, 2011-01 |
Performance evaluation of photolithography cluster tools Morrison, James R; Martin, DP, OR SPECTRUM, v.29, no.3, pp.375 - 389, 2007-07 |
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