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Non-Cyclic Scheduling of a Wet Station Kim, Hyunjung; Lee, Jun-Ho; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.11, no.4, pp.1262 - 1274, 2014-10 |
Scheduling a wet station for wafer cleaning with multiple job flows and multiple wafer-handling robots Lee, Tae-Eog; Lee, HY; Lee, SJ, INTERNATIONAL JOURNAL OF PRODUCTION RESEARCH, v.45, no.3, pp.487 - 507, 2007-02 |
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