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Controlled Wafer Release in Clustered Photolithography Tools: Flexible Flow Line Job Release Scheduling and an LMOLP Heuristic Park, Kyungsu; Morrison, James R, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.12, no.2, pp.642 - 655, 2015-04 |
Variational Deep Clustering of Wafer Map Patterns Hwang, Jonghyun; Kim, Heeyoung, IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.33, no.3, pp.466 - 475, 2020-08 |
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