Target erosion of rocking-magnet sputtering system
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Lee, Won-Jong | - |
| dc.contributor.author | Lee, Do Seon | - |
| dc.date.accessioned | 2013-03-18T11:31:16Z | - |
| dc.date.available | 2013-03-18T11:31:16Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2004 | - |
| dc.identifier.citation | Kyoto Joint Symposium on Materials Science and Engineering for the 21st Century, v., no., pp.69 - 69 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/147992 | - |
| dc.language | ENG | - |
| dc.title | Target erosion of rocking-magnet sputtering system | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 69 | - |
| dc.citation.endingpage | 69 | - |
| dc.citation.publicationname | Kyoto Joint Symposium on Materials Science and Engineering for the 21st Century | - |
| dc.identifier.conferencecountry | Japan | - |
| dc.identifier.conferencecountry | Japan | - |
| dc.contributor.localauthor | Lee, Won-Jong | - |
| dc.contributor.nonIdAuthor | Lee, Do Seon | - |
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