RF 필터응용을 위한 FBAR 소자제작과 증착온도가 ZnO 박막의 결정성장에 미치는 영향

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Publisher
한국해양정보통신학회
Issue Date
2003-05
Language
KOR
Citation

한국해양정보통신학회춘계학술대회, pp.88 - 92

URI
http://hdl.handle.net/10203/146896
Appears in Collection
EE-Conference Papers(학술회의논문)
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