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College of Engineering(공과대학)School of Electrical Engineering(전기및전자공학부)EE-Conference Papers(학술회의논문)

RPCVD silicon nitride passivation of InGaAsP with temperature ramping during deposition

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Kim J. / Cha J.-H. / Ha M.-L. / Kim C.-Y. / Kwon, Young Seresearcher
Issue Date
2005-05-16
Language
ENG
Citation

207th ECS Meeting, pp.361 - 366

URI
http://hdl.handle.net/10203/144624
Appears in Collection
EE-Conference Papers(학술회의논문)
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