Thermochemical stability of IrO2 bottom electrodes in direct liquid injection metalorganic chemical vapor deposition of Pb(Zr,Ti)O3 films
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Lee, Won-Jong | - |
| dc.contributor.author | Byun, KM | - |
| dc.contributor.author | Kim, YH | - |
| dc.date.accessioned | 2013-03-18T01:27:33Z | - |
| dc.date.available | 2013-03-18T01:27:33Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2003 | - |
| dc.identifier.citation | 8th Conference of the European Ceramic Society, v., no., pp.8 - 8 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/143580 | - |
| dc.language | ENG | - |
| dc.title | Thermochemical stability of IrO2 bottom electrodes in direct liquid injection metalorganic chemical vapor deposition of Pb(Zr,Ti)O3 films | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 8 | - |
| dc.citation.endingpage | 8 | - |
| dc.citation.publicationname | 8th Conference of the European Ceramic Society | - |
| dc.identifier.conferencecountry | Turkey | - |
| dc.identifier.conferencecountry | Turkey | - |
| dc.contributor.localauthor | Lee, Won-Jong | - |
| dc.contributor.nonIdAuthor | Byun, KM | - |
| dc.contributor.nonIdAuthor | Kim, YH | - |
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