DSpace at KOASAS: The effect of composition and annealing environment on formation of nanocrystal Si memory using ECR-PECVD-deposited silicon-rich silicon oxide

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College of Natural Sciences(자연과학대학)Graduate School of Nanoscience and Technology(나노과학기술대학원)NT-Conference Papers(학술회의논문)

The effect of composition and annealing environment on formation of nanocrystal Si memory using ECR-PECVD-deposited silicon-rich silicon oxide

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Daigil, C / Shin, JungHoon researcher

Issue Date: 2004

Language: KOR

Citation: 한국물리학회

URI: http://hdl.handle.net/10203/143050

Appears in Collection: NT-Conference Papers(학술회의논문)

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The effect of composition and annealing environment on formation of nanocrystal Si memory using ECR-PECVD-deposited silicon-rich silicon oxide

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