DC Field | Value | Language |
---|---|---|
dc.contributor.author | Kim, K.J. | - |
dc.contributor.author | Moon, D.W. | - |
dc.contributor.author | Yang, M.-S. | - |
dc.contributor.author | Shin, JungHoon | - |
dc.date.accessioned | 2013-03-17T10:46:36Z | - |
dc.date.available | 2013-03-17T10:46:36Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2004-04-13 | - |
dc.identifier.citation | New Materials for Microphotonics, v.817, no., pp.115 - 120 | - |
dc.identifier.issn | 0272-9172 | - |
dc.identifier.uri | http://hdl.handle.net/10203/142509 | - |
dc.language | ENG | - |
dc.title | In-situ control of nitrogen content and the effect on PL properties of SiNx films grown by ion beam sputter deposition | - |
dc.type | Conference | - |
dc.identifier.scopusid | 2-s2.0-5544232329 | - |
dc.type.rims | CONF | - |
dc.citation.volume | 817 | - |
dc.citation.beginningpage | 115 | - |
dc.citation.endingpage | 120 | - |
dc.citation.publicationname | New Materials for Microphotonics | - |
dc.identifier.conferencecountry | United States | - |
dc.identifier.conferencecountry | United States | - |
dc.contributor.localauthor | Shin, JungHoon | - |
dc.contributor.nonIdAuthor | Kim, K.J. | - |
dc.contributor.nonIdAuthor | Moon, D.W. | - |
dc.contributor.nonIdAuthor | Yang, M.-S. | - |
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