A large grain polycrystalline silicon film for resistive bolometersA large grain polycrystalline silicon film for resistive bolometers
- Issue Date
- 2003-12-01
- Language
- ENG
- Citation
Materials and Devices for Smart Systems, v.785, pp.501 - 506
- ISSN
- 0272-9172
- Appears in Collection
- EE-Conference Papers(학술회의논문)
- Files in This Item
- There are no files associated with this item.
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