DC Field | Value | Language |
---|---|---|
dc.contributor.author | Jeon B.I. | - |
dc.contributor.author | Chang, Hong-Young | - |
dc.contributor.author | Shon J. | - |
dc.date.accessioned | 2013-03-17T04:31:48Z | - |
dc.date.available | 2013-03-17T04:31:48Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2003-06-02 | - |
dc.identifier.citation | IEEE International Conference on Plasma Science, 2003, v., no., pp.423 - | - |
dc.identifier.issn | 0730-9244 | - |
dc.identifier.uri | http://hdl.handle.net/10203/139864 | - |
dc.language | ENG | - |
dc.publisher | IEEE | - |
dc.title | Electrical Characteristics of the Dual Frequency Capacitively Coupled Plasma(CCP) | - |
dc.type | Conference | - |
dc.identifier.scopusid | 2-s2.0-0141893241 | - |
dc.type.rims | CONF | - |
dc.citation.beginningpage | 423 | - |
dc.citation.publicationname | IEEE International Conference on Plasma Science, 2003 | - |
dc.identifier.conferencecountry | South Korea | - |
dc.identifier.conferencecountry | South Korea | - |
dc.contributor.localauthor | Chang, Hong-Young | - |
dc.contributor.nonIdAuthor | Jeon B.I. | - |
dc.contributor.nonIdAuthor | Shon J. | - |
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