Power Dissipation Mode Transition Induced by a Driving Frequency Increase in Capacitively Coupled Plasma
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | You, S.J. | - |
| dc.contributor.author | Kim, H.C. | - |
| dc.contributor.author | Chang, Hong-Young | - |
| dc.contributor.author | Lee, J.K. | - |
| dc.date.accessioned | 2013-03-17T02:03:29Z | - |
| dc.date.available | 2013-03-17T02:03:29Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2003-06-02 | - |
| dc.identifier.citation | 2003 IEEE International Conference on Plasma Science, v., no., pp.352 - | - |
| dc.identifier.issn | 0730-9244 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/138643 | - |
| dc.language | ENG | - |
| dc.publisher | IEEE | - |
| dc.title | Power Dissipation Mode Transition Induced by a Driving Frequency Increase in Capacitively Coupled Plasma | - |
| dc.type | Conference | - |
| dc.identifier.scopusid | 2-s2.0-0141997071 | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 352 | - |
| dc.citation.publicationname | 2003 IEEE International Conference on Plasma Science | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.contributor.localauthor | Chang, Hong-Young | - |
| dc.contributor.nonIdAuthor | You, S.J. | - |
| dc.contributor.nonIdAuthor | Kim, H.C. | - |
| dc.contributor.nonIdAuthor | Lee, J.K. | - |
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