Design, Fabrication and Characterization of Piezoelectric Multi-layer Cantilever Microactuators for the Minimum Initial Deflection
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Kim, MJ | - |
| dc.contributor.author | Cho, Young-Ho | - |
| dc.date.accessioned | 2013-03-17T01:37:27Z | - |
| dc.date.available | 2013-03-17T01:37:27Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1999-06-07 | - |
| dc.identifier.citation | 10th Inter. Conf. Solid-State Sensors and Actuators (Transducers '99), v., no., pp.1758 - 1761 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/138423 | - |
| dc.language | ENG | - |
| dc.title | Design, Fabrication and Characterization of Piezoelectric Multi-layer Cantilever Microactuators for the Minimum Initial Deflection | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 1758 | - |
| dc.citation.endingpage | 1761 | - |
| dc.citation.publicationname | 10th Inter. Conf. Solid-State Sensors and Actuators (Transducers '99) | - |
| dc.identifier.conferencecountry | Japan | - |
| dc.identifier.conferencecountry | Japan | - |
| dc.contributor.localauthor | Cho, Young-Ho | - |
| dc.contributor.nonIdAuthor | Kim, MJ | - |
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