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College of Engineering(공과대학)Dept. of Bio and Brain Engineering(바이오및뇌공학과)BiS-Conference Papers(학술회의논문)

Sub-nanometric Motion Detectors using Branched Finger Comb Electrodes with High-amplitude Sensing Signal

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Han, Ki-Ho / Lee, Won Chul / Cho, Young-Horesearcher
Issue Date
2001-09
Language
ENG
Citation

5th Inter. Conf. Micro Opto Electro Mechanical Systems (MOEMS 2001), pp.159 - 160

URI
http://hdl.handle.net/10203/137889
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BiS-Conference Papers(학술회의논문)
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