블록 공중합체 박막내부에 기억 소자용 자성 금속 함침Magentic metal inclusion for memory devices in the block copolymer thin films
In summary, we successfully synthesized well ordered holes with P(S-MMA) polymer template. In addition, we impregnated magnetic metal into polymer template. By RIE and ion milling, we successfully transferred this pattern into silicon wafer substrate. Also, we anticipate this skill can be applied so many application such as DNA chip, storage memory device, and advanced nano-lithography, and so on.
- Publisher
- 한국화학공학회
- Issue Date
- 2002-10-01
- Language
- KOR
- Citation
한국화학공학회 추계학술발표회, pp.0 - 0
- Appears in Collection
- CBE-Conference Papers(학술회의논문)
- Files in This Item
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