DC Field | Value | Language |
---|---|---|
dc.contributor.author | Wada, H. | - |
dc.contributor.author | Lee, D. | - |
dc.contributor.author | Yu, Kyoungsik | - |
dc.contributor.author | Krishnamoorthy | - |
dc.contributor.author | Zappe, S. | - |
dc.contributor.author | Solgaard, O. | - |
dc.date.accessioned | 2013-03-16T23:52:14Z | - |
dc.date.available | 2013-03-16T23:52:14Z | - |
dc.date.created | 2012-06-28 | - |
dc.date.issued | 2002 | - |
dc.identifier.citation | International Conference on Optics-Photonics Design and Fabrication, v., no., pp. - | - |
dc.identifier.uri | http://hdl.handle.net/10203/137481 | - |
dc.language | ENG | - |
dc.publisher | International Conference on Optics-Photonics Design and Fabrication | - |
dc.title | High speed MEMS scanning mirror with vertical combdrive | - |
dc.type | Conference | - |
dc.type.rims | CONF | - |
dc.citation.publicationname | International Conference on Optics-Photonics Design and Fabrication | - |
dc.identifier.conferencecountry | United States | - |
dc.identifier.conferencecountry | United States | - |
dc.contributor.localauthor | Yu, Kyoungsik | - |
dc.contributor.nonIdAuthor | Wada, H. | - |
dc.contributor.nonIdAuthor | Lee, D. | - |
dc.contributor.nonIdAuthor | Krishnamoorthy | - |
dc.contributor.nonIdAuthor | Zappe, S. | - |
dc.contributor.nonIdAuthor | Solgaard, O. | - |
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