A Study on the Formation and Characteristics of a-Fluoronated Carbon Films by CF4/CH4-ICPCVD
- Publisher
- The ELECTROCHEMICAL SOCIETY
- Issue Date
- 2000
- Language
- ENG
- Citation
The ELECTROCHEMICAL SOCIETY 197th Meeting
- Appears in Collection
- PH-Conference Papers(학술회의논문)
- Files in This Item
- There are no files associated with this item.
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