Plasma enhanced atomic layer deposition of transition metal nitrides (Invited talk)
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Kang, Sang-Won | ko |
| dc.date.accessioned | 2013-03-16T22:42:56Z | - |
| dc.date.available | 2013-03-16T22:42:56Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2001-05 | - |
| dc.identifier.citation | Atomic Layer Deposition conference | - |
| dc.identifier.uri | http://hdl.handle.net/10203/136815 | - |
| dc.language | English | - |
| dc.publisher | ALD | - |
| dc.title | Plasma enhanced atomic layer deposition of transition metal nitrides (Invited talk) | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.publicationname | Atomic Layer Deposition conference | - |
| dc.identifier.conferencecountry | US | - |
| dc.identifier.conferencelocation | Monterey, California | - |
| dc.contributor.localauthor | Kang, Sang-Won | - |
- Appears in Collection
- MS-Conference Papers(학술회의논문)
- Files in This Item
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.