Nonlocal Electron Kinetics in a Planar Inductive Discharge
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Chang, Hong-Young | - |
| dc.date.accessioned | 2013-03-16T22:02:50Z | - |
| dc.date.available | 2013-03-16T22:02:50Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2000 | - |
| dc.identifier.citation | 17th Symposium on plasma processing(SPP17), v., no., pp. - | - |
| dc.identifier.uri | http://hdl.handle.net/10203/136360 | - |
| dc.language | ENG | - |
| dc.title | Nonlocal Electron Kinetics in a Planar Inductive Discharge | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.publicationname | 17th Symposium on plasma processing(SPP17) | - |
| dc.identifier.conferencecountry | Japan | - |
| dc.identifier.conferencecountry | Japan | - |
| dc.contributor.localauthor | Chang, Hong-Young | - |
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